DUV Mask Metrology Station from Germany
A deep ultraviolet metrology station used to measure chrome patterns, quartz thickness, and defectivity on DUV photomasks in semiconductor fabs. It is automated for high-volume inspection and relies on optical measurement techniques. This places it under tariff item 9031.49.90 as an other optical measuring or checking instrument.
Duty Rate — Germany → Canada
Import Tips
• Ensure the metrology station is described as an optical measuring instrument on the customs invoice to support classification under 9031.49.90
• Verify whether the equipment qualifies for duty relief under the Customs Tariff's machinery remissions if used in semiconductor manufacturing
• Keep records of the technical specifications in case CBSA requests verification of the optical measurement function