Zygo VeriFire XP8 Reticle Phase Measurement System from Japan
The Zygo VeriFire XP8 is a laser Fizeau interferometer system used for measuring phase errors and wavefront aberrations in phase-shift photomasks for semiconductor lithography. It provides angstrom-level precision for optical proximity correction verification. This instrument is classified under tariff item 9031.41.00 as an optical instrument for inspecting photomasks and reticles in semiconductor manufacturing.
Duty Rate — Japan → Canada
0%
Import Tips
• Ensure the interferometer's specific use for phase-shift photomask measurement is documented to support classification under 9031.41.00
• The CBSA may require technical specifications showing angstrom-level precision
• If the system includes analysis software, confirm whether it is a separate import or part of the system's value