Nova V-R series OCD Metrology Tool from Germany
An Optical Critical Dimension (OCD) scatterometry system for semiconductor wafer film thickness and profile measurement using spectroscopic ellipsometry. Non-destructive process control for advanced nodes, this tool falls under 9031.41.00 as it inspects semiconductor wafers or devices.
Duty Rate — Germany → Canada
0%
Import Tips
• Declare under 9031.41.00 as an optical instrument for semiconductor wafer inspection
• Provide technical specifications to CBSA showing its use in semiconductor manufacturing
• Verify eligibility for duty remission