ASML YieldStar Optical Metrology Tool from Germany
An overlay and focus metrology system for semiconductor wafers using diffraction-based optical measurements to ensure lithographic pattern accuracy. Used post-exposure to monitor process control in high-volume manufacturing, this tool is classified under 9031.41.00 as it inspects semiconductor wafers.
Duty Rate — Germany → Canada
0%
Import Tips
• Verify that the metrology tool is specifically for semiconductor wafers to qualify for 9031.41.00
• Keep records of the intended use and technical documentation
• Consult with a customs specialist to ensure compliance with Canadian regulations