ASML YieldStar Optical Metrology Tool from Germany
An overlay and focus metrology system for semiconductor wafers using diffraction-based optical measurements to ensure lithographic pattern accuracy. Used post-exposure to monitor process control in high-volume manufacturing, this tool is classified under 9031.41.00 as it inspects semiconductor wafers or devices.
Duty Rate — Germany → Canada
0%
PGA flags
No agency flag on this HTS number in the CBSA Single Window matching criteria.
CBSA Single Window matching criteria, unknown
Import Tips
• Classify under 9031.41.00 as an optical instrument for inspecting semiconductor wafers
• Provide detailed specifications to CBSA showing its use in semiconductor manufacturing
• Consider duty deferral programs if importing for a licensed manufacturer