PVD Target Shutter Mechanism from Germany
A pneumatically or motor-driven shutter blocking the line-of-sight from sputtering target to substrate in PVD systems. It is used in multi-layer deposition sequences within 8543.70 apparatus, preventing unwanted deposition during process steps.
Duty Rate — Germany → Canada
0%
Import Tips
• Classify as a part of PVD apparatus under 8543.70; provide details on the actuation mechanism
• Ensure it is not classified as a valve or shutter of another heading
• Confirm the mechanism is not a complete machine