PVD Plasma Cleaning Head from Germany
An RF-powered electrode assembly for pre-deposition substrate cleaning in PVD chambers. It is part of physical vapor deposition apparatus under subheading 8543.70, removing contaminants via reactive plasma to enhance adhesion.
Duty Rate — Germany → Canada
0%
Import Tips
• Declare as a part of PVD apparatus under 8543.70; specify the RF power requirements
• Ensure it is not classified as a separate plasma generator
• Provide technical documentation showing its integration into the PVD chamber