Pfeiffer Vacuum Cluster Tool PVD from Japan
Pfeiffer Vacuum Cluster Tool PVD is a physical vapor deposition apparatus that integrates multiple PVD process chambers with central handling for compound semiconductor manufacturing. It features cryopump technology for UHV conditions. This apparatus is classified under tariff item 8543.70.00 as an electrical machine with individual functions not specified elsewhere in Chapter 85.
Duty Rate — Japan → Canada
0%
Import Tips
• Declare the system as a complete PVD apparatus; provide CBSA with chamber configuration details
• Check if cryopumps are separately classifiable
• Consider a ruling for cluster tools