Novellus (Lam Research) SPEED PVD from Japan
Novellus (Lam Research) SPEED PVD is a physical vapor deposition apparatus using ionized metal plasma technology for advanced copper interconnect filling in semiconductor devices. It features collimation and resputtering capabilities. This apparatus is classified under tariff item 8543.70.00 as an electrical machine with individual functions not specified elsewhere in Chapter 85.
Duty Rate — Japan → Canada
0%
Import Tips
• Confirm the system is not classifiable under heading 84.86; provide CBSA with process details
• Ensure all components are declared accurately
• Consider a customs ruling for advanced semiconductor equipment