KLA-Tencor Surfscan SP5 Cooling Condensing Unit from China
A condensing unit with a capacity exceeding 17.58 kW/hr, designed for the KLA-Tencor Surfscan SP5 wafer surface inspection system used in semiconductor metrology cleanrooms. It manages thermal loads from laser scanning operations on semiconductor wafers, ensuring stable temperature and humidity conditions. This unit falls under tariff item 8415.83.00 as it is an air conditioning component not incorporating a refrigerating unit.
Duty Rate — China → Canada
Import Tips
• Ensure the condensing unit is declared as a non-refrigerating air conditioning component under 8415.83.00, and provide technical specifications showing capacity over 17.58 kW/hr
• Verify if the unit qualifies for duty relief under the Machinery Program if used directly in semiconductor manufacturing
• Keep records of the end-use in a cleanroom environment for CBSA verification